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薄膜電容濕度傳感器工作原理：Water vapour penetrates the upper electrode and reaches the active polymer film. 水蒸汽穿過上部電極 , 到達(dá)活性聚合物薄膜。

How much water vapour is absorbed into the film depends on the ambient relative humidity. 多少水蒸汽被薄膜吸收取決于周圍環(huán)境的相對濕度。

Because the sensor is small and the polymer film thin , the sensor responds quickly to changes in ambient humidity. 因為傳 感器尺寸小和聚合物薄膜很薄，所以傳感器可以對周圍環(huán)境的濕度變化作出快速反應(yīng)。

The water vapor absorbed in the film changes the dielectric properties of the sensor: the capacitance of the sensor changes. 聚合物中吸收的水蒸汽 改變了傳感器的電介質(zhì)特性 ：傳感器的電容值改變。 The change in the sensor's capacitance is measured with measurement electronics . 傳感器電容的改變通過測量電路來測量。